Deep Ultraviolet Light Observation System for Microscopes U-UVF248

Deep Ultraviolet Light Observation System for Microscopes
U-UVF248

Simply by adding a new module to a new or existing Olympus Microscope you can make high-magnification DUV light real-time observation

• High resolution :
Bright high contrast DUV images bring high resolving power.
• Advanced flexibility :
Offers greater freedom in system design
• Economical solutiont:
Offers upgradeable DUV systems for Semiconductor inspection microscope MX series
• Bright high contrast DUV images :
 
DUV light image Visible light image
• Newly designed dedicated DUV light objective lens :
 
• Light weight and compact :
 

Deep Ultraviolet Light Observation System for Microscopes U-UVF248 : Specifications

• U-UVF248 deep ultraviolet microscope unit specifications :
UV248 compatible intermediate tube Light source 80 W mercury xenon lamp U-UVF248IM DUV optics Wavelength
Objective
Intermediate
magnification
Field number
Usage environment 		248?4 nm
Special DUV100xobjective/NA 0.9 WD 0.2mm
2.5x
12.5 (actual view field 50?m)
23?5?C
Visible optics Objective
Intermediate
magnificationField number		 UIS2 objective
1x
22 (camera observation 20)
UV248 compatible light source box U-UVF248LB Brightness
adjustment
Shutter		 Manual adjustment from 0 to 100%
Up-down lever switch
UV quartz light guide
U-UVF2FB/5FB		 Length of 2 or 5 m
Mercury xenon lamp housing 80 W mercury xenon lamp
Power supply Ushio product (100-120 V)

• DUV image capture :
DUV camera XCD-SX910UV (Sony) High-resolution DUV digital camera
SXGA 1280(H) x 960(V) ultraviolet region: 190-380 nm (also corresponds to visible-light region)
DUV camera control PCI bus IEEE1394 image input board
Computer for camera control (Windows XP, drive: CD-ROM or DVD-ROM)
System requirements for image analysis software Memory:256 MB or more (512 MB recommended)
CPU: Pentium III 500 MHz or higher
Display: 1280 x1024 SXGA or higher
Browser: Internet Explorer 3.02 or later (8.0 or later recommended)

• Compatible microscope :
Recommended microscope system Semiconductor inspection microscope/MX61
300mm semiconductor/FPD inspection microscope/MX61L
Industrial inspection microscope/MX51

• Utility and weight:
Power consumption 3 kW (maximum)
Weight Approx. 46 kg (with MX61) and approx. 28 kg (with MX51)

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