Advanced basic optical performance and diverse observation modes reaching the highest efficiency in observation and inspection - 300mm wafer/FPD inspection microscope
300mm Wafer / FPD Inspection Microscope MX61L : Features
The UIS2, further advanced optical system, delivers finer observation images; clear, high-contrast brightfield images with optimized color temperature and the highest detection precision in darkfield observation, and enables quick detection of minute scratches.
The MX61/61L, users can preset AS in 14 steps for each objective power so that optimal image contrast is performed immediately, whenever the objective is changed. This eliminates the time and effort spent on AS adjustment, reduces operator fatigue and speeds up the inspection process.
Both microscopes offer with a single lever offer quick observation mode select — brightfield, darkfield and optional cube. A transmitted light illumination unit can also be combined with both MX61/MX61L microscope stands.
The MX-SIC1412R2 provides a larger Y transmitted light illumination area (284 mm) than the previous model (increased by 55 mm in the Y-axis). In addition, the stage grip has a built-in clutch, to allow exchange between fine and coarse movement while retaining the grip on the handle.
Near Infrared optical modules
Suitable for wafer bonding and wafer bump inspection
Contact pad of wafer bump s(Reverse side)
Fluorescence illumination modules
For fluorescence observation, a mirror unit can be added in the slider. U*, B and G excitation mirror units are available; they are used for inspecting resist residue or organic LEDs.
*Since U excitation is applicable to some objectives, please contact Olympus representatives.
Motorized stage MS200 for wafer loader AL110-8 System
To locate automatically the inspection points on wafer
Wafer loader AL110-8 system
Motorized stage MS200
The MX61/61L comply in full with international specifications and standards such as SEMI S2/S8, CE, and UL, and respond to environmental and safety issues with a high level of reliability.
Reflected light illumination (F.N. 26.5)
12V, 100W halogen lamp (pre-centering type)
Brightfield / darkfield mirror plus 1 cube (option*), exchange method
Built-in motorized aperture diaphragm (Pre-setting for each objective, automatically open for darkfield observation)
Transmitted light illumination* (F.N. 26.5)
*
When transmitted light unit MX-TILLA and MX-TILLB are combined.
Illumination by light source LG-PS2 and light guide LG-SF(12V,100W halogen lamp) or their equivalent.
•
MX-TILLA: condenser (N.A.0.5), with aperture stop
•
MX-TILLB: condenser (N.A.0.6), with aperture stop and field stop
Observation methods
1 Brightfield 2 Darkfield 3 Normarski DIC 4 Simple polarizing 5 Fluorescence 6 near IR
7Transmitted light brightfield 8Transmitted light simple polarizing
* Separate (optional) cubes are required for 3, 4 and 5.
* 7 and 8 require combination with a transmitted illumination unit.
Nosepiece
Motorized sextuple revolving nosepiece with slider srot for DIC: U-D6REMC
Motorized quintuple BD revolving nosepiece with slider srot for DIC: U-D5BDREMC
Motorized centerable quintuple revolving nosepiece with slider srot for DIC: U-P5REMC
Forward rotation by objective exchange button on the front panel of microscope, or directly by hand switch U-HSTR2 (user designation)
Observation tube
Super widefield erect image tilting trinocular tube (F.N.26.5): MX-SWETTR
Others: Super widefield trinocular tube / Widefield binocular tube
Super widefield erect image tilting trinocular tube (F.N.26.5): MX-SWETTR or U-SWETTR
(MX-SWETTR is equipped for MX61L as standard.)
