Industrial inspection microscope MX51 series The MX51 microscope is an industrial inspection microscope with improved basic optical performance, increased expandability, and the capability of handling a wide variety of specimens such as metals, various types of raw materials and 150mm semiconductor wafers.

The optical performance was improved so that the level of brightness in the darkfield observation has been realized 4 times higher* than that of the former model, MX40. *in the recommended configuration

A coarse and fine adjustment clutch built into the large-size stage allows the MX51 to operate agilely.
MX51-F + MX-SIC6R-2

Units designed for the ESD protection*are provided to keep the electrostatic away during the observation. *An ESD-compatible microscope body, stage, eyepiece and revolving nosepiece are available.

Transmitted light illumination unit MX-TILLK
To be inserted between the stage(MX-SIC6R2) and the focusing unit base

IR (Near-infrared) unit
Suitable for the observation of bonding pads and wafer bumps

Wafer loader AL110-6

Various reflected light illuminators and revolving nosepieces

A wide variety of reflected light illuminators and revolving nosepieces are provided to allow the user to select the most suitable one for specific observation method.

BX-URA2, BX-RLA2, RX-RLAA Manual revolving nosepieces

Motorized revolving nosepieces

The main operating functions are arranged on and around the front panel for easy access. The MX51 complies with the industrial standards SEMI S2 and S8. * SEMI: Semiconductor Equipment and Material International SEMI S2 is the guideline for safety, and S8 is the guideline for ergonomics.

MX51 Optical system UIS2 optics(infinity-corrected) Main body (frame) Built-in power supply for reflected light illumination (12 V 100 W halogen lamp) Coarse/fine adjustment coaxial knob system Stroke per rotation of the coarse adjustment knob: 17.85 mm, stroke per rotation of the fine adjustment knob: 0.1 mm Vertical stroke: 32 mm (2 mm upward, 30 mm downward) Mechanism for adjusting the weight of the coarse adjustment knob Coarse adjustment upper-limit stopper Complies with SEMI S2/S8 Reflected light illumination system A reflected-light illumination unit is supplied as an add-on part. It can be used with the observation tube of 1x and the super widefield of 1x (FN26.5). BX-RLA2 Reflected light illuminator for brightfield and darkfield Observation switching: Between BF and DF slide system Observation methods: (1) Reflected brightfield (2) Reflected darkfield (3) Reflected DIC (4) Simple reflected polarized light (5) Reflected IR (infrared) observation (6) Transmitted light brightfield (with an optional unit) BX-URA2 Universal reflected fluorescence illuminator Observation switching: Turret-type mirror units (a maximum of 6 pieces) Observation methods: (1) Reflected brightfield (2) Reflected darkfield (3) Reflected DIC (4) Simple reflected polarized light (5) Reflected fluorescence (6) Transmitted light brightfield (with an optional unit) Lamp housing Halogen lamp housing: U-LH100L-3 Built-in power supply Mercury lamp housing: U-LH100HGAPO Power supply BH2-RFL-T3 is required Transmitted light illumination MX-TILLK LG-PS2 fiber guide illumination unit is needed (to be used together with the MX-SIC6R2). Electric system 100-120 / 220-240V, 1.8A / 0.8A, 50/60Hz Continuously variable brightness adjusting knob Observation tube U-BI30-2 widefield binocular tube, U-TR30-2 widefield trinocular tube, U-ETR-3 widefield erect image trinocular tube (field number: 22) U-SWTR-3 super widefield trinocular tube, MX-SWETTR super widefield erect image tilting trinocular tube (field number: 26.5) Revolver Manual: U-5RE-2, U-6RE, U-P6RE, U-D6RE, U-D7RE, U-5BDRE, U-D5BDRE, U-P5BDRE, U-D6BDRE Motorized: U-D6REMC, U-D5BDREMC, U-P5REMC Stage U-SIC4R2/SIC4L2 (to be used with MX-STAD) Handle to the lower right (or left) of the coaxis, 4 x 4 inch Drive method: Rack-and-pinion Lock mechanism: Locked in the Y direction using a locking lever 3- or 4-inch wafer holders can be mounted using an optional plate. MX-SIC6R2 Handle to the lower right of the coaxis, 6 x 6 inch Drive method: Belt drive Stroke: 158(X) mm x 158(Y) mm Range of transmitted light illumination: 100 x 100 mm Outside dimensions, weight Dimensions: Approximately 430 (W)x 591 (D) x 495 (H) Weight: Approx. 26 kg