Maintaining the high level of reliability and safety achieved by the AL110 series, AL110-12 provides an additional feature to allow the user to automatically inspect 300mm wafers under a microscope.
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300mm wafer and FOSB (Front Opening Shipping Box) compatible
Inspection modes are selectable. The design of AL110-12 is optimized to increase the operability in the 300mm wafer back-end process. FOSB is compatible as the standard type of cassette. Load port (FOUP Opener) type is optional.
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Macro illumination unit (optional)
Fiber light guide illumination is available to enable the user to inspect wafers for foreign particles, scratches, film undulations, etc.
Wafer Loader AL110-12 : Specifications
Wafer Size
300mm (SEMI M1.15 t=775?m)
Standard type of cassette
FOSB (Front Opening Shipping Box) SEMI: M31 standard type
Number of cassette
1 Cassette (load /unload on the same route)
Height of cassette loading position
900mm
Transfer modes
Top macro | Back macro | Micro
Inspection mode
Sequential or Sampling
Wafer alignment
Non-contact centering
Wafer handling method
Vacuum attraction mechanical loading
Compatible microscope
Semiconductor Wafer Inspection microscope MX61L and equivalents.
