WAFER LOADER AL110 Super clean and fast wafer transfer

•	Two types of wafer loaders to cover 100mm-200mm wafer sizes
•	AL110-8 SERIES Standard wafer loader for 150mm and 200mm wafers, with high-performance functions in a truly compact design
•	AL110-6 SERIES First-ever no-contact centering for small diameter wafers (100mm-150mm) sets the new loading standard
•	Over 20% less tact time
•	Improved cleanliness
•	Complete macro inspection of the wafer’s back surface
•	Free setting of inspection modes
•	Making operation easier and more comfortable
•	Outstanding safety and reliability
•	Safe wafer transfer with scanning stage
•	Fully motorized control for superior inspection efficiency

200mm versions 200 /150mm compatible versions 100 /125 /150mm compatible versions L LM LB MB LMB L LM LB MB LMB L LM LMB Wafer diameters*1 200mm orientation flat type, 200mm notch type o o   150mm orientation flat type   o   100mm, 125mm and 150mm orientation flat type     o Cassette Fluoroware, H-ber type o Number of cassette One o Inspection modes and sampling Sequential o Transfer modes Micro inspection o o o   o o o o   o o o o Top macro inspection   o   o o   o   o o   o o Back macro inspection     o o o     o o o     o 2nd back surface macro inspection     o o o     o o o     o Orientation flat/notch alignment One every 90?, O.F./notch alignment also available before unloading wafers into cassette o No-contact centering o Wafer transfer Robot arms with vacuum pickup o Adaptable microscope*2 MX61 o MX51   o Dimensions (mm) 580 (W) x580 (D) x297 (H) 490 (W) x520 (D) x297 (H) Weight (kg) 30 32 31 31 33 30 32 31 31 33 26 28 30 Utilities Power source: AC100 to 120V 0.90A or AC220 to 240V 0.55A 50/60Hz, Vacuum pressure: -67kPa to -80kPa

*1 Applicable for SEMI and JEIDA 6- and 8-inch wafers. *2 Besides the MX61 and MX51, other equivalent microscopes are available. Please contact your nearest OLYMPUS distributors about the options.