AUTOMATIC SEMICONDUCTOR
MX61A
To provide optimum solutions which are flexible automation and highly extensibility. Selectable controllers, Inspection and Analysis can fulfill your needs in the 300mm Automatic Semiconductor Inspection Microscope System.

300mm Wafer / FPD Inspection Microscope
MX61L
Advanced basic optical performance and diverse observation modes reaching the highest efficiency in observation and inspection
-  300mm wafer/FPD inspection microscope

Industrial inspection microscope
MX51
The MX51 microscope is an industrial inspection microscope with improved basic optical performance, increased expandability, and the capability of handling a wide variety of specimens such as metals, various types of raw materials and 150mm semiconductor wafers.

DEEP ULTRAVIOLET LIGHT OBSERVATION
SYSTEM FOR MICROSCOPES
U-UVF248
Simply by adding a new module to a new or existing Olympus Microscope you can make high-magnification DUV light real-time observation