LEXT OLS4000: 3D Measuring Laser Microscope

LEXT OLS4000: 3D Measuring Laser Microscope

A Model Equipped with a 405 nm Laser and Possible to Perform 3D Geometric Observation/Measurement and Surface Roughness Measurement in a Micro Range at High Resolution

This model is equipped with a newly-developed dual confocal system that enables measurement of samples conventionally difficult to be measured. The LEXT OLS4000 has enhanced the surface roughness measurement function and achieved output results with the same operability and compatibility as those of a contact surface-roughness measuring machine, while making the most of the non-contact benefits.

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Imaging Slopes Up to 85 Degrees

Thanks to dedicated objective lenses with high numerical apertures and a dedicated optical system that obtains maximum performance from the 405 nm laser, the LEXT OLS4000 can reliably measure acute-angled specimens that were previously impossible to measure.

Razor with acute angle
Razor with acute angle

LEXT special design objective lens
LEXT Special design objective lens


Overcoming Reflectance Differences

The LEXT OLS4000 employs a newly developed dual confocal system. Thanks to the integration of two confocal optical systems, the LEXT OLS4000 can capture a clear image from a specimen consisting of materials with different reflectance characteristics.

Specimen with Diverse Reflectance
Specimen with Diverse Reflectance (Diamond-electrodeposited Tool)

Dual Confocal System
Dual Confocal system


Minimize influence from Measurement Environments

To eliminate external influences on measurement and from measurement environment, the LEXT OLS4000 incorporates a hybrid vibration-damping mechanism using coil springs and damping rubber. This eliminates the need for a dedicated vibration-damping stand, allowing measurements on any desktop.

Anti Vibration System (Damping Mechanism)
Hybrid Vibration-damping Mechanism

External Vibration Vibration gone by anti vibration mechanism
Reduced Vibration Influence with the Vibration Isolation Mechanism


World's First Double Performance Guarantees

The performance of a measuring tool or its accuracy is expressed in two different terms. One is "Accuracy", which indicates how close a measurement value is to the true value, and the other is "Repeatability", which indicates the degree of variations among repeated measurement values. The LEXT OLS4000 assures both accuracy and repeatability - a world's first for laser microscopes.

Guarantee accuracy
Two Performance Guarantees

The LEXT OLS4000 uses a rigorous system of production for every component from the objective lens to the laser head, Olympus delivers only the highest quality systems to customers after thorough inspection based on stringent standards. Final adjustment and calibration is performed at delivery by qualified engineers in the actual measurement environment.


Reproducing More Realistic Images of Micro Asperities

Differential Interference Contrast (DIC) is an observation method for visualizing sub-nanometer micro asperities,which are far beyond the resolving power of a laser microscope. This DIC allows you to obtain live images comparable to those of an electron microscope under relatively low power magnifications.

Polymer film with LASER DIC
Laser Confocal with DIC (Polymer Film)

Polymer film with Laser only
Laser Confocal (Polymer Film)


Supporting Wide-field Observation

A higher-magnification image generally narrows the visual field range. The stitching function enables you to stitch up to 500 images together to create high-resolution, wide-field image data. Additionally, 3D display and 3D measurement are possible even for this wide-field image.

Image before Stitching Image after stitching, clear brightness
Brightness of Image After Stitching still even and clear

Very good 3D image, even by stitching
Stitched 3D Image


Customizable ID Control and Security Enhancement

Operators can log in to the LEXT OLS4000 using individualized IDs to customize the image database and operating environment. Each ID is displayed on every report and specimen image, giving the administrator an at-a-glance picture of when each report was created or each image was captured and who created each report or captured each image.

Allow multiple user with permission level
Login GUI


Wizard Function that Gives Novice Operators a Sense of Security

For quick and easy operation by new operators, the LEXT OLS4000 has a detailed user designed wizard function. This wizard function eliminates the time spent on reading the manual and lengthy training.

User Friendly Wizard, allow first time user to use LEXT like expert
Wizard Frame Function


Macro Map that Doesn't Get Lost for Observation

Since the visual field is narrowed during observation under high magnification, in many circumstances the operator can lose track of the location of the specimen. The LEXT OLS4000 is equipped with the macro map function. The screen always displays a wide-field image of the specimen under low magnification, displaying a rectangular observation marker on the macro specimen image.

Macro mapping, allow you to know where you are even with high magnification
Macro Map Function


Motorized Revolving Nosepiece to Prevent Specimen Contact and Automatically Adjust Illumination for Optimized Imaging

The LEXT OLS4000 is equipped with a motorized revolving nosepiece as standard to prevent contact with a specimen during objective lens change. When a new lens is selected, the revolving nosepiece automatically retracts to avoid contacting the specimen. At the same time, the revolving nosepiece automatically brings the objective lens into focus along with image alignment and adjusts light intensity, allowing stress-free switchover of magnifications.

Motorized revolving nosepieces, prevent accidental contact
Motorized Revolving Nosepiece


Intelligent Noise Removal (INR) Algorithm Allows Even First-time Users to Easily Visualize an Image Comparable to a Skilled Operator's

For optimal operation, Olympus has successfully preset a skilled operator's criteria in the system based on experience accumulated over Olympus's 90 year history. Much of this is attributable to the INR (Intelligent Noise Reduction) algorithm newly installed on the LEXT OLS4000. This algorithm allows even a new operator to easily obtain an image identical to that of a expert.

INR (Intelligence Noise Removal) algorithm from Olympus Without INR
INR Algorithm Installed / Not Installed


Speedy Generation of Easy-to-understand Reports

Fast production of easy-to-understand reports is vital to a laser microscope. The LEXT OLS4000 generates a report with one click. It is also provided with an edit function to allow the operator to customize each template. It is also provided with an edit function to allow the operator to customize each template.

Easy report generation Customized able report
Completed Report Form / Customized


New "Roughness Measurement" Capabilities Open New Possibilities in Measurement

The LEXT OLS4000 has been developed to represent a new standard of surface roughness measuring tool. This system is calibrated in the same way contact surface roughness gauges are calibrated, and has the necessary roughness parameters and filters required per ISO and JQA. This allows users with contact surface roughness gauges to obtain output results from the system consistent with their existing instruments, with the advantage of greater speed and noncontact measurement. The LEXT OLS4000 has a new roughness-specific mode enabling roughness profile measurement for sample lengths up to 100 mm with the new automatic line stitching function.

Roughness measurement mode GUI
Roughness Measurement GUI


Measurement Profile Comparison between OLS4000 and Contact Surface Roughness Gage (Total profile length: 1.6 mm)
Entire Length of Profile: 1.6 mm
Primary profile before filter
Primary profile after filter
Primary profile of contact type roughness measurement
Primary Profile from LEXT OLS4000
λs=2.5 µm without Filtering
Primary Profile from LEXT OLS4000
λs=2.5 µm with Filtering

Primary Profile from a Contact Surface Roughness Measuring Machine
Parameters List

Parameter list of Surface Profile
LEXT OLS4000 Surface Profile Parameters List

Parameter list of Surface roughness
LEXT OLS4000 Surface Roughness Parameters List
(Conforms to ISO25178 Draft)


Micro Roughness

Contact surface roughness measuring machines cannot measure micro asperities less than the stylus tip diameter. The laser microscope can measure the surface roughness of micro geometries at high resolution due to a minute laser spot diameter.

Contact type roughness cannot get to the deepest of the hole
Contact Surface Roughness Measuring Machine

With LEXT, laser spot is small, allow to get the deepest of the hole
Laser Microscope


Non-Contact

Since a contact surface roughness measuring machine uses a hard needle-shape stylus, it is more likely to scratch the surface of a soft specimen, damaging or deforming it. With adhesive specimens, on the other hand, the stylus could attach to the specimen and be damaged when pulled loose, making it impossible to obtain correct results. Laser microscopes, which are of a non-contact type, can perform accurate surface roughness measurement regardless of surface texture conditions.

Soft surface specimen can be measured
Soft Specimen

Adhesive surface can be measured, but contact type cannot
Adhesive Specimen


Measurement of Micro Areas

Surface roughness measuring machines cannot measure micro areas since their stylus are not able to access these areas. Laser microscopes can correctly identify a measuring position and easily perform roughness measurement of a target micro area.

Small specimen like Bonding wire can be scanned
Bonding Wires


3D Measuring Laser Microscope LEXT OLS4000 Specifications
Optical System UIS2 Optical System (Infinity-corrected)
Total Magnification 108x - 17280x
Field of View 2560x2560 - 16x16 µm
Microscope Frame Observation Method BF/DIC/Laser/Laser Confocal DIC
Laser 405 nm Semiconductor Laser
White Light White LED
Focus Z Stage Stroke 100 mm
Maximum Height of Specimen 100 mm
Z Revolving Nosepiece Stroke 10 mm
Resolution 0.01 µm
Repeatability σn-1=0.012 µm
Objective Lens 5x, 10x, 20x, 50x, 100x
Optical Zoom 1x - 8x
Stage Motorized Stage 100x100 mm
Dimensions 276(W)x358(D)x405(H) mm
Weight 32 kg (Main Unit)